Silicon Wafers

Prime, Monitor and Dummy Wafers

We deal in a variety of silicon wafers used as substrates for LSI, discrete devices, sensors, MEMS, etc. which are manufactured according to customers' needs.
Also we deal in silicon wafers with special features for R&D purpose, which are manufactured in response to a request from customers.

Outline Specifications of Silicon Wafers

  Prime Wafers Monitor Wafers Dummy Wafers
Growth Method CZ or FZ CZ or FZ CZ
Conductivity Type N or P N or P N or P
Dopant P, Sb, or B P, Sb, or B P, Sb, or B
Crystal Orientation <100> or <111> <100> or <111> <100> or <111>
Resistivity(Ω・cm) Arbitrary values
between 0.01 Ω・cm
and 1,000 Ω・cm
Arbitrary values
between 0.01 Ω・cm
and 1,000 Ω・cm
Arbitrary values
between 0.01 Ω・cm
and 1,000 Ω・cm
Diameter(inch) 2 inches ~ 12 inches 2 inches ~ 12 inches 2 inches ~ 12 inches
Thickness(μm) 280 μm ~ 775 μm 280 μm ~ 775 μm 280 μm ~ 775 μm
Surface Finish Polished Polished Polished
Reverse Surface Finish Etched or Polished Etched or Polished Etched or Polished

Nominal thickness of a silicon wafer differs depending on its diameter.
Other specifications conform to the JEIDA, SEMI and JIS standard.